Nikon NEXIV VMZ-K 6555

NEXIV VMZ-K 6555 – Ground-breaking multi-functional confocal video measuring system

The Nikon Confocal NEXIV VMZ-K6555 was developed on the strength of Nikon’s leading opto-mechatronics (optical, mechanical and electronic) technologies. It incorporates a variety of confocal optics for fast and accurate evaluation of fine three-dimensional surface metrology, image processing technology, and TT L laser autofocus. It allows both 2D and height measurements in the same field of view.

The Confocal NEXIV VMZ-K6555 is used for the inspection and measurement of critical dimensions of highly complex structures on advanced semiconductor devices, probe cards, substrate patterns on circuit boards, MEMS and a variety of other demanding applications.

Key benefits

• Simultaneous wide-area height measurement with Nikon proprietary confocal optics
• 2D measurement with 15x brightfield zoom optics
• Fully compatible with 300 mm wafer measurement at semiconductor fabs
• Handles printed circuit board sizes with its 650 x 550mm stroke

Applications

• IC Packages: Flip Chip/COF(Bump)/COG, CSP (FBGA)/SIP (Bump, Wire), Interposer (Pad height)
• MEMS
• Probe Card (Silicon Probe, Au Probe)
• Precise Glass Components (Micro Lens, Contact Lens)
• Photo Spacer Width/Height for Color Filter for FPD Panel

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