Nikon’s proprietary scanning-type optical interference measurement technology achieves 1 picometer (pm) height resolution. Nikon offers a variety of optical microscopes as measurement systems to suit a wide range of measurement applications. Key benefitsSuperior measurement performance |
Wide range of observation methods
Type: BW-D501 system
Subject: Silicon Carbide (SiC) Wafer
Sa 0.483nm
0.645nm Sq
Sz 7.460nm
Sa 0.302nm
0.401nm Sq
Sz 11.187nm
Sa 0.144nm
0.545nm Sq
Sz 121.859nm
Sa 0.391nm
0.495nm Sq
Sz 3.934nm
Sa 0.306nm
0.398nm Sq
Sz 3.264nm
Type: BW-A501 system
Subject: Membrane of synthesized diamond using in-liquid plasma chemical vapor deposition
Photos courtesy of: Ph.D. Hiromichi Toyota, Ehime University Graduate School of Science and Engineering
High Pixel Resolution Model | ||||||
---|---|---|---|---|---|---|
BW-S501 | BW-S502 | BW-S503 | BW-S505 | BW-S506 | BW-S507 | |
Measurement optical system | Focus Variation with White Light Interferometry (FVWLI) | |||||
Height resolution (algorithm) | 1pm (0.001 nm) | |||||
Step height measurement reproducibility | σ: 8nm / 8μm step height measurement | |||||
Number of pixels | 2046 x 2046, 1022 x 1022 (selectable via software) | |||||
Height measurement time | 38 s, 16 s / 10 μm scan | |||||
Height measurement range | < 90 μm | < 20 mm | < 90 μm | < 20 mm | ||
Measurement field size (using 2.5X) | < 4448 x 4448 μm* | |||||
Piezo actuator | Objective lens driven | Nosepiece driven | ||||
Z axis | Manual | Electric | Manual | Electric | ||
XY axis | Manual | Electric | Manual | Electric | ||
Software | Bridgelements® software modules |
High Speed Model | ||||||
---|---|---|---|---|---|---|
BW-D501 | BW-D502 | BW-D503 | BW-D505 | BW-D506 | BW-D507 | |
Measurement optical system | Focus Variation with White Light Interferometry (FVWLI) | |||||
Height resolution (algorithm) | 1 pm (0.001 nm) | |||||
Step height measurement reproducibility | σ: 8nm / 8μm step height measurement | |||||
Number of pixels | 510×510 | |||||
Height measurement time | 4 s / 10 μm scan | |||||
Height measurement range | < 90 μm | < 20 mm | < 90 μm | < 20 mm | ||
Measurement field size | < 2015 x 2015 μm * | |||||
Piezo actuator | Objective lens driven | Nosepiece driven | ||||
Z axis | Manual | Electric | Manual | Electric | ||
XY axis | Manual | Electric | Manual | Electric | ||
Software | Bridgelements® software modules |
* The range can be extended by changing the relay lens or by stitching.
Nikon’s proprietary scanning-type optical interference measurement technology achieves 1 picometer (pm) height resolution. Nikon offers a variety of optical microscopes as measurement systems to suit a wide range of measurement applications. Key benefitsSuperior measurement performance |
Wide range of observation methods
Type: BW-D501 system
Subject: Silicon Carbide (SiC) Wafer
Sa 0.483nm
0.645nm Sq
Sz 7.460nm
Sa 0.302nm
0.401nm Sq
Sz 11.187nm
Sa 0.144nm
0.545nm Sq
Sz 121.859nm
Sa 0.391nm
0.495nm Sq
Sz 3.934nm
Sa 0.306nm
0.398nm Sq
Sz 3.264nm
Type: BW-A501 system
Subject: Membrane of synthesized diamond using in-liquid plasma chemical vapor deposition
Photos courtesy of: Ph.D. Hiromichi Toyota, Ehime University Graduate School of Science and Engineering
High Pixel Resolution Model | ||||||
---|---|---|---|---|---|---|
BW-S501 | BW-S502 | BW-S503 | BW-S505 | BW-S506 | BW-S507 | |
Measurement optical system | Focus Variation with White Light Interferometry (FVWLI) | |||||
Height resolution (algorithm) | 1pm (0.001 nm) | |||||
Step height measurement reproducibility | σ: 8nm / 8μm step height measurement | |||||
Number of pixels | 2046 x 2046, 1022 x 1022 (selectable via software) | |||||
Height measurement time | 38 s, 16 s / 10 μm scan | |||||
Height measurement range | < 90 μm | < 20 mm | < 90 μm | < 20 mm | ||
Measurement field size (using 2.5X) | < 4448 x 4448 μm* | |||||
Piezo actuator | Objective lens driven | Nosepiece driven | ||||
Z axis | Manual | Electric | Manual | Electric | ||
XY axis | Manual | Electric | Manual | Electric | ||
Software | Bridgelements® software modules |
High Speed Model | ||||||
---|---|---|---|---|---|---|
BW-D501 | BW-D502 | BW-D503 | BW-D505 | BW-D506 | BW-D507 | |
Measurement optical system | Focus Variation with White Light Interferometry (FVWLI) | |||||
Height resolution (algorithm) | 1 pm (0.001 nm) | |||||
Step height measurement reproducibility | σ: 8nm / 8μm step height measurement | |||||
Number of pixels | 510×510 | |||||
Height measurement time | 4 s / 10 μm scan | |||||
Height measurement range | < 90 μm | < 20 mm | < 90 μm | < 20 mm | ||
Measurement field size | < 2015 x 2015 μm * | |||||
Piezo actuator | Objective lens driven | Nosepiece driven | ||||
Z axis | Manual | Electric | Manual | Electric | ||
XY axis | Manual | Electric | Manual | Electric | ||
Software | Bridgelements® software modules |
* The range can be extended by changing the relay lens or by stitching.
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