Cerere oferta

    Tastează codul: captcha

      Descarcă catalogul TopMetrology

      Tastează codul din dreapta in câmpul de jos: captcha

      BW-Series: White Light Interferometric Microscope System

      • Accurate sub-nano-surface profiler with non-contact measurement

        Nikon’s proprietary scanning-type optical interference measurement technology achieves 1 picometer (pm) height resolution. Nikon offers a variety of optical microscopes as measurement systems to suit a wide range of measurement applications.

        Key benefits

        Superior measurement performance

        • Realizes 0.1 nm-level measurements of ultra-smooth surfaces with neither averaging nor filtering process.
        • Enables measurements with the same height resolution in a wide range of magnifications.
        • Enables measurement of both smooth and rough surfaces without changing measurement mode or optical filters.
        • Captures both an all-in-focus image and a surface height image.

        Wide range of observation methods

         

        Sub-nano-level measurement in a wide range of magnifications

        Type: BW-D501 system

        Subject: Silicon Carbide (SiC) Wafer

      Sa 0.483nm 
      0.645nm Sq 
      Sz 7.460nm

      Sa 0.302nm 
      0.401nm Sq 
      Sz 11.187nm

      Sa 0.144nm 
      0.545nm Sq 
      Sz 121.859nm

      Sa 0.391nm 
      0.495nm Sq 
      Sz 3.934nm

      Sa 0.306nm 
      0.398nm Sq 
      Sz 3.264nm

      Precise surface measurements for micrometer-range rough surfaces

      Type: BW-A501 system
      Subject: Membrane of synthesized diamond using in-liquid plasma chemical vapor deposition
      Photos courtesy of: Ph.D. Hiromichi Toyota, Ehime University Graduate School of Science and Engineering

      Height calibration with the NIST-certified VLSI standard

      BW-D501 system

       

      Specifications: White Light Interferometric Microscope System

       
       
       High Pixel Resolution Model
      BW-S501BW-S502BW-S503BW-S505BW-S506BW-S507
      Measurement optical systemFocus Variation with White Light Interferometry (FVWLI)
      Height resolution (algorithm)1pm (0.001 nm)
      Step height measurement reproducibilityσ: 8nm / 8μm step height measurement
      Number of pixels2046 x 2046, 1022 x 1022 (selectable via software)
      Height measurement time38 s, 16 s / 10 μm scan
      Height measurement range< 90 μm< 20 mm< 90 μm< 20 mm
      Measurement field size (using 2.5X)< 4448 x 4448 μm*
      Piezo actuatorObjective lens drivenNosepiece driven
      Z axisManualElectricManualElectric
      XY axisManualElectricManualElectric
      SoftwareBridgelements® software modules
       High Speed Model
      BW-D501BW-D502BW-D503BW-D505BW-D506BW-D507
      Measurement optical systemFocus Variation with White Light Interferometry (FVWLI)
      Height resolution (algorithm)1 pm (0.001 nm)
      Step height measurement reproducibilityσ: 8nm / 8μm step height measurement
      Number of pixels510×510
      Height measurement time4 s / 10 μm scan
      Height measurement range< 90 μm< 20 mm< 90 μm< 20 mm
      Measurement field size< 2015 x 2015 μm *
      Piezo actuatorObjective lens drivenNosepiece driven
      Z axisManualElectricManualElectric
      XY axisManualElectricManualElectric
      SoftwareBridgelements® software modules

      * The range can be extended by changing the relay lens or by stitching.

      Description

      • Accurate sub-nano-surface profiler with non-contact measurement

        Nikon’s proprietary scanning-type optical interference measurement technology achieves 1 picometer (pm) height resolution. Nikon offers a variety of optical microscopes as measurement systems to suit a wide range of measurement applications.

        Key benefits

        Superior measurement performance

        • Realizes 0.1 nm-level measurements of ultra-smooth surfaces with neither averaging nor filtering process.
        • Enables measurements with the same height resolution in a wide range of magnifications.
        • Enables measurement of both smooth and rough surfaces without changing measurement mode or optical filters.
        • Captures both an all-in-focus image and a surface height image.

        Wide range of observation methods

         

        Sub-nano-level measurement in a wide range of magnifications

        Type: BW-D501 system

        Subject: Silicon Carbide (SiC) Wafer

      Sa 0.483nm 
      0.645nm Sq 
      Sz 7.460nm

      Sa 0.302nm 
      0.401nm Sq 
      Sz 11.187nm

      Sa 0.144nm 
      0.545nm Sq 
      Sz 121.859nm

      Sa 0.391nm 
      0.495nm Sq 
      Sz 3.934nm

      Sa 0.306nm 
      0.398nm Sq 
      Sz 3.264nm

      Precise surface measurements for micrometer-range rough surfaces

      Type: BW-A501 system
      Subject: Membrane of synthesized diamond using in-liquid plasma chemical vapor deposition
      Photos courtesy of: Ph.D. Hiromichi Toyota, Ehime University Graduate School of Science and Engineering

      Height calibration with the NIST-certified VLSI standard

      BW-D501 system

       

      Specifications: White Light Interferometric Microscope System

       
       
       High Pixel Resolution Model
      BW-S501BW-S502BW-S503BW-S505BW-S506BW-S507
      Measurement optical systemFocus Variation with White Light Interferometry (FVWLI)
      Height resolution (algorithm)1pm (0.001 nm)
      Step height measurement reproducibilityσ: 8nm / 8μm step height measurement
      Number of pixels2046 x 2046, 1022 x 1022 (selectable via software)
      Height measurement time38 s, 16 s / 10 μm scan
      Height measurement range< 90 μm< 20 mm< 90 μm< 20 mm
      Measurement field size (using 2.5X)< 4448 x 4448 μm*
      Piezo actuatorObjective lens drivenNosepiece driven
      Z axisManualElectricManualElectric
      XY axisManualElectricManualElectric
      SoftwareBridgelements® software modules
       High Speed Model
      BW-D501BW-D502BW-D503BW-D505BW-D506BW-D507
      Measurement optical systemFocus Variation with White Light Interferometry (FVWLI)
      Height resolution (algorithm)1 pm (0.001 nm)
      Step height measurement reproducibilityσ: 8nm / 8μm step height measurement
      Number of pixels510×510
      Height measurement time4 s / 10 μm scan
      Height measurement range< 90 μm< 20 mm< 90 μm< 20 mm
      Measurement field size< 2015 x 2015 μm *
      Piezo actuatorObjective lens drivenNosepiece driven
      Z axisManualElectricManualElectric
      XY axisManualElectricManualElectric
      SoftwareBridgelements® software modules

      * The range can be extended by changing the relay lens or by stitching.

      View more See less

      Do you have more questions?

      You can request an offer

      BW-Series: White Light Interferometric Microscope System

      Request offer

      Funding

      Financing solutions for the purchase of new equipment, through BCR Leasing or Grenke.

      See Financing Methods

      See Product Catalog

      You can find all our products that you can always rely on!

      Open the Catalog