BW-Series: White Light Interferometric Microscope System
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Accurate sub-nano-surface profiler with non-contact measurement
Nikon’s proprietary scanning-type optical interference measurement technology achieves 1 picometer (pm) height resolution. Nikon offers a variety of optical microscopes as measurement systems to suit a wide range of measurement applications.
Key benefits
Superior measurement performance
- Realizes 0.1 nm-level measurements of ultra-smooth surfaces with neither averaging nor filtering process.
- Enables measurements with the same height resolution in a wide range of magnifications.
- Enables measurement of both smooth and rough surfaces without changing measurement mode or optical filters.
- Captures both an all-in-focus image and a surface height image.
Wide range of observation methods
- The system can be used as an optical microscope. Brightfield, polarizing, DIC and fluorescenceobservations are all possible.
Sub-nano-level measurement in a wide range of magnifications
Type: BW-D501 system
Subject: Silicon Carbide (SiC) Wafer
Sa 0.483nm
0.645nm Sq
Sz 7.460nm
Sa 0.302nm
0.401nm Sq
Sz 11.187nm
Sa 0.144nm
0.545nm Sq
Sz 121.859nm
Sa 0.391nm
0.495nm Sq
Sz 3.934nm
Sa 0.306nm
0.398nm Sq
Sz 3.264nm
Precise surface measurements for micrometer-range rough surfaces
Type: BW-A501 system
Subject: Membrane of synthesized diamond using in-liquid plasma chemical vapor deposition
Photos courtesy of: Ph.D. Hiromichi Toyota, Ehime University Graduate School of Science and Engineering
Height calibration with the NIST-certified VLSI standard
BW-D501 system
Specifications: White Light Interferometric Microscope System
| High Pixel Resolution Model | ||||||
|---|---|---|---|---|---|---|
| BW-S501 | BW-S502 | BW-S503 | BW-S505 | BW-S506 | BW-S507 | |
| Measurement optical system | Focus Variation with White Light Interferometry (FVWLI) | |||||
| Height resolution (algorithm) | 1pm (0.001 nm) | |||||
| Step height measurement reproducibility | σ: 8nm / 8μm step height measurement | |||||
| Number of pixels | 2046 x 2046, 1022 x 1022 (selectable via software) | |||||
| Height measurement time | 38 s, 16 s / 10 μm scan | |||||
| Height measurement range | < 90 μm | < 20 mm | < 90 μm | < 20 mm | ||
| Measurement field size (using 2.5X) | < 4448 x 4448 μm* | |||||
| Piezo actuator | Objective lens driven | Nosepiece driven | ||||
| Z axis | Manual | Electric | Manual | Electric | ||
| XY axis | Manual | Electric | Manual | Electric | ||
| Software | Bridgelements® software modules | |||||
| High Speed Model | ||||||
|---|---|---|---|---|---|---|
| BW-D501 | BW-D502 | BW-D503 | BW-D505 | BW-D506 | BW-D507 | |
| Measurement optical system | Focus Variation with White Light Interferometry (FVWLI) | |||||
| Height resolution (algorithm) | 1 pm (0.001 nm) | |||||
| Step height measurement reproducibility | σ: 8nm / 8μm step height measurement | |||||
| Number of pixels | 510×510 | |||||
| Height measurement time | 4 s / 10 μm scan | |||||
| Height measurement range | < 90 μm | < 20 mm | < 90 μm | < 20 mm | ||
| Measurement field size | < 2015 x 2015 μm * | |||||
| Piezo actuator | Objective lens driven | Nosepiece driven | ||||
| Z axis | Manual | Electric | Manual | Electric | ||
| XY axis | Manual | Electric | Manual | Electric | ||
| Software | Bridgelements® software modules | |||||
* The range can be extended by changing the relay lens or by stitching.
